Frequency Induced Stiction for MEMS Accelerometers

by Ul­rich Baehr, Mar­vin Freier, Matthew Lewis, Markus Linck-Les­canne, Chris­t­ian Budak, Wolf­gang Rosen­stiel, and Oliver Bring­mann
In Jour­nal of Mi­cro­electro­mechan­i­cal Sys­tems 29(3): 285–295. IEEE, 2020.