Rapid Sensitivity Curve Measurement for MEMS Accelerometers

by Ul­rich Baehr, Mar­vin Freier, Matthew Lewis, Wolf­gang Rosen­stiel, and Oliver Bring­mann
In 2018 12th In­ter­na­tional Con­fer­ence on Sens­ing Tech­nol­ogy (ICST), pages 77–82. IEEE, 2018.